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This RP reviews factors to consider in the design of cleanroom facilities, provides a framework to establish performance criteria, and includes details on specific processes and systems. A new section on energy efficiency helps users evaluate initial costs and life-cycle costs and includes a table of energy-conserving steps. The document also covers contamination control procedures for the construction phase.

Product Details

Published:
01/01/2007
ISBN(s):
9780978786816
Number of Pages:
62
File Size:
1 file , 1.9 MB