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This RP presents guidelines for maintaining cleanroom integrity at all times, including during routine maintenance, modifications, and equipment replacement. The document provides a basis for preparing standard operating procedures for any cleanroom. It also outlines test procedures for verifying cleanliness of cleanroom apparatus and surfaces.
Product Details
- Published:
- 09/01/2004
- ISBN(s):
- 9781877862977
- Number of Pages:
- 24
- File Size:
- 1 file , 1.1 MB